7. SURFACE ANALYSIS BY MEANS OF IS

Surface analysis by means of IS consists of determining the elemental and chemical composition of near surface layers. The elemental composition is determined by:

• 7.1. Qualitative composition analysis technique
• 7.2. Standard samples technique
• 7.3. Elemental sensitivity coefficients technique
• 7.4. Analysis depth
• 7.5. Investigation of chemical bonding between the atoms

7.3. Elemental sensitivity coefficients technique

This technique (see note) is aimed at determining the elemental composition of the homogenious sample in the absence of any standards in-situ. Using this technique assumes knowledge of elemental sensitivity coefficients Si (see note) [Ref 2]. The ratio of j-th element in the investigated sample and simple (single component) substance,

(7.3.1)

contains - EBE factors of single element standards and Ij - IL intensity of the investigated sample. The values of Sj are given in the corresponding pages of the Handbook. Therefore, to determine Cj with (7.3.1), it is necessary to measure IL intensities of every element inside the sample, and calculate with (6.1.3) on the basis of experimental or tabulated values of r.

Look further: 7.4. Analysis depth