6. INTENSITY OF IONIZATION LINES

• 6.1. IL intensity
• 6.2. Primary electron energy selection

6.2. Primary electron energy selection

As it follows from (6.1.2) the IL intensity depends on the primary electron energy Ep. First, the non-elastic scattering cross section growth while the primary electron energy Ep increases, reaches the maximum at and then decreases. The EBE factor is monotonically decreasing with Ep growth for light elements, and can have a maximum at Ep =300..600 eV for heavy elements. The effective analysis depth for Ep>100 eV is increasing as energy growth. Analysis of all those factors (including related to measurement setup) has shown that while making surface investigations with IS technique it is better to select the values of Ep in the range of 0.2..2 keV.

Look further: 7. SURFACE ANALYSIS BY MEANS OF IS