The electron spectrometer is the device for investigation of energetic distribution of secondary electrons N(E),
which are emmited from the sample. It consists of:
ultra-high vacuum chamber ( Pa); primary electron source - electron gun; electron energy analyser; electron detector; additional devices for transporting, rotation, heating, ion etching, air-vacuum loading of the investigated sample,
pressure gauges, residual gas analysers, other techniques for surface preparation; detection unit, working in the analog differentiation mode or electron counting mode.
The functioning of these devices is described in the literature, specific features of spectrometer design are given
by manufacturing companies.
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