It allows to determine the following parameters of surface layer of a solid:
elemental composition from the value of  (Z) (beginning from hydrogen); chemical bonding of atoms on the surface (chemical composition) from IL
chemical shift; distribution of elements with depth in the pre-surface layer without its
destruction (nondestructive profiling), from dependency of effective analysis depth
 (Ep) on the primary electron energy; spectrum of the empty electronic states from the fine nearthreshold structure
of IL contour (paragraph 1.4 and [Ref 3]); interatomic distances from numerical processing of extended fine structure of IL,
caused by the electron wave properties [Ref 3, Ref 7].
The IS technique supplements the other methods of electron spectroscopy. It is
simply arranged in practice and is entirely hardware compatible with such diagnostics
techniques as AES, LEED, threshold spectroscopies, etc. It is a full member
of the arsenal of techniques used in the complex investigations, which allow to exploit
the advantages and compensate the drawbacks of each of them.
|
